Unified material-to-systems simulation, design, and verification for semiconductor design and manufacturing

ABSTRACT

A complete, unified material-to-systems simulation, design, and verification method for semiconductor design and manufacturing may include evaluating effects of semiconductor material or process changes on software algorithms. The method may include translating the material or process change into a database of characteristics; generating primitive circuit structures using the database of characteristics; performing an electrical characterization of the primitive circuit structures; providing an output of the electrical characterization to a script to generate compact models; generating a lite version of standard cells; generating a digital system based on the lite version of the standard cells; and evaluating a performance of a software algorithm on the digital system to determine an effect of the material or process change for the semiconductor manufacturing process.

BACKGROUND

Circuit architectures over the past several decades have used scalingtechniques to meet the demands of ever-increasing workloads. Scalingtraditionally reduces the feature size of integrated circuit elements(e.g., from 10 nm, to 7 nm, to 5 nm, and so forth). However, thephysical limitations of silicon structures have dramatically slowed thegains that may be made from scaling techniques in recent years as thelimitations of physics are reached. Additionally, with the recentemergence of artificial intelligence and machine learning algorithms(AWL), the amount of data to be processed and the diversity of differentworkload types are beginning to overtake the gains that can be made byscaling technologies. The hardware compute requirements are growingexponentially, and new circuit fabrication advances may be required tomaintain this pace. Therefore, the increasing processing demands fromAI/ML technologies, combined with the decreasing performance gainsrealized through traditional circuit scaling may require alternativetechniques to improve performance.

SUMMARY

In some embodiments, a complete, unified material-to-systems simulation,design, and verification method for semiconductor design andmanufacturing may include evaluating effects of semiconductor materialor process changes on software algorithms. The method may includetranslating the material or process change into a database ofcharacteristics; generating primitive circuit structures using thedatabase of characteristics; performing an electrical characterizationof the primitive circuit structures; providing an output of theelectrical characterization to a script to generate compact models;generating a lite version of standard cells; generating a digital systembased on the lite version of the standard cells; and evaluating aperformance of a software algorithm on the digital system to determinean effect of the material or process change for the semiconductormanufacturing process.

In some embodiments, a system may include one or more processors and oneor more memory devices. The one or more memory devices may includeinstructions that, when executed by the one or more processors, causethe one or more processors to perform operations including receiving amaterial or process change for a semiconductor manufacturing process;translating the material or process change into a database ofcharacteristics; generating primitive circuit structures using thedatabase of characteristics; performing an electrical characterizationof the primitive circuit structures; providing an output of theelectrical characterization to a script to generate compact models;generating a lite version of standard cells; generating a digital systembased on the lite version of the standard cells; and evaluating aperformance of a software algorithm on the digital system to determinean effect of the material or process change for the semiconductormanufacturing process.

In some embodiments, a non-transitory computer-readable medium mayinclude instructions that, when executed by one or more processors,cause the one or more processors to perform operations includingreceiving a material or process change for a semiconductor manufacturingprocess; translating the material or process change into a database ofcharacteristics; generating primitive circuit structures using thedatabase of characteristics; performing an electrical characterizationof the primitive circuit structures; providing an output of theelectrical characterization to a script to generate compact models;generating a lite version of standard cells; generating a digital systembased on the lite version of the standard cells; and evaluating aperformance of a software algorithm on the digital system to determinean effect of the material or process change for the semiconductormanufacturing process.

In any embodiments, any of the following features may be implemented inany combination and without limitation. The primitive circuit structuresmay include a transistor. Performing the electrical characterization ofthe primitive circuit structures may include generating current andvoltage characteristics for the transistor. The method/operations mayalso include performing a TCAD simulation of the primitive circuitstructures; generating circuit models of the primitive circuitstructures using the database of characteristics and the TCADsimulation; performing a circuit simulation of the circuit models;and/or determining that the material or process change for thesemiconductor manufacturing process is acceptable based on results ofthe circuit simulation of the circuit models. The method/operations mayalso include receiving a plurality of material or process changes forthe semiconductor manufacturing process; translating the plurality ofmaterial or process changes into the database of characteristics;generating additional primitive circuit structures using the database ofcharacteristics for each of the plurality of material or processchanges; simulating the additional primitive circuit structures; andidentifying acceptable material or process changes in the plurality ofmaterial or process changes based on results of simulating the primitivecircuit structures. The primitive circuit structures may include amemory film stack. The lite version of the standard cells may include amemory array. The compact models may include a ring oscillator. Themethod/operations may also include testing a performance of the ringoscillator to determine PPAC characteristics; and determining that theperformance of the ring oscillator is acceptable before generating thelite version of the standard cells. The lite version of the standardcells may omit features that are not required for the digital system.The software algorithm may include an AI/ML algorithm. Themethod/operations may also include generating a lite version of aProcess Design Kit (PDK) using the lite version of the standard cells.Cells in the PDK may use abstracted values extracted from the databaseof characteristics. The lite version of the PDK may include only cellsthat are affected by the material or process change for thesemiconductor manufacturing process. The digital system may be aprocessor. The method/operations may also include conducting at leasttwo short-loop optimization tests before generating the digital systemto test PPAC characteristics of the primitive circuit structures and thelite version of the standard cells.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of variousembodiments may be realized by reference to the remaining portions ofthe specification and the drawings, wherein like reference numerals areused throughout the several drawings to refer to similar components. Insome instances, a sub-label is associated with a reference numeral todenote one of multiple similar components. When reference is made to areference numeral without specification to an

FIG. 1 illustrates a process flow of different operations that may beperformed to evaluate how we change to a material or process affectsfull electronic circuit systems, according to some embodiments.

FIG. 2 illustrates a unified process flow of operations that may beperformed in a single workflow to evaluate how a change to a material orprocess affects full systems, according to some embodiments.

FIG. 3 illustrates a flowchart of a method for performing a full systemevaluation for material/process changes with short-loop sub evaluationsat incremental stages, according to some embodiments.

FIG. 4 illustrates an example of a short-loop optimization using theintegrated testing workflow described above in FIG. 3, according to someembodiments.

FIG. 5 illustrates an example of a second short-loop optimization totranslate the technology features into design rules, and then into alite PDK library, according to some embodiments.

FIG. 6 illustrates an example computer system, in which variousembodiments may be implemented.

DETAILED DESCRIPTION

Circuit architectures over the past several decades have used scalingtechniques to meet the demands of ever-increasing workloads. Scalingtraditionally reduces the feature size of integrated circuit elements(e.g., from 10 nm, to 7 nm, to 5 nm, and so forth). However, thephysical limitations of silicon structures have dramatically slowed thegains that may be made from scaling techniques in recent years.Additionally, with the recent emergence of artificial intelligence andmachine learning algorithms (AI/ML), the amount of data to be processedand the diversity of different workload types are beginning to overtakethe gains that can be made by scaling technologies. Hardware computerequirements are growing exponentially, and new circuit fabricationadvances may be required to maintain this pace. Therefore, theincreasing processing demands from AWL technologies, combined with thedecreasing performance gains realized through traditional circuitscaling may require alternative techniques to improve performance. Onesuch alternative technique for improving performance ismaterials/process innovation by equipment manufacturers.

Materials innovation includes, for example, any change to the variousphysical aspects of a semiconductor device, such as the size of asource/drain contact, types of isolation between transistors, gate oxidematerials, work function metals, doping in source/drain regions, contactmaterials, liners in the contact materials, and/or any other parametersof a semiconductor device. The impact of these types of changes on largeprocessors and/or Systems-on-Chip (SoCs) with different softwarealgorithms may not be clear at the early stage of the semiconductordesign cycle. For example, the Power-Performance-Area-Cost (PPAC)improvements of the material engineering innovation may seem small, butmay be multiplied dramatically at an SoC level, or vice-versa.

Despite the promising gains that may be made by materials innovation,difficulties and inherent limitations with existing tools, processes,and systems make material innovations difficult to realize in practicewithout an extensive, multi-year design validation process. Because ofthe complexity inherent in designing, testing, implementing, andproducing complex circuit-based systems, the design process hastraditionally been split between different entities in the semiconductorecosystem. For example, a material or process change at thesemiconductor level would be introduced using by an equipmentmanufacturer. The material change would then later be implemented insimple device structures with compact models at a semiconductorfabrication plant or foundry. Process design kits (PDKs), Standard Cellslibraries, and embedded memories for a process design kit (PDK) weredeveloped by integrated circuit design entities providing electronicdesign automation (EDA) software. The standard cells/memories in the PDKwe used by a “fabless” device design entities or integrated devicemanufacturers (IDMs) to generate block level designs, full SoCs, andsystem-level devices. Finally, software designers would use themanufactured IC devices to run complex software designs and algorithms.Each of these different stages of the IC design and manufacturingpipeline was executed by different entities, each of which useddifferent software/hardware tools to perform their portion of theprocess.

Currently, there is very little connectivity between the differentstages in this process. For example, simple devices and/or compactmodels designed by the foundry are tested against their own internalbenchmarks to determine that the corresponding simple circuit devicemeets their technical requirements. The simple devices and/or compactmodels would then be passed to the integrated circuit (IC) designentity, which would use the compact models to design full PDK, StandardCells, and memory cells for the EDA software. Again, the IC designentity would test the standard cells against their own internaltechnical requirements. Finally, the standard cells would be used todesign full IC systems, which would again be tested against their ownsoftware benchmarks. Because of the lack of connectivity between each ofthe different entities and software/hardware tools, it was impossible toknow the full ramifications of a process or material change made by anequipment vendor as that change propagated through the semiconductorecosystem to full AWL systems.

Note that the lack of connectivity between the various portions of theIC design and manufacturing process is the result of technical problemsrather than business requirements. Existing software/hardware tools donot support the integration of these different processes into a singleworkflow that can be implemented by a single computer system. Theembodiments described herein help solve this and other technicalproblems by providing linking software tools between the various stagesof the existing IC design and manufacturing process. The embodimentsdescribed herein also alter existing design tool flows such that theycan rapidly implement and test the small changes to materials orprocesses without requiring the design of complete libraries of standardcells and memory arrays. Finally, the embodiments described hereindramatically reduce the time it takes to evaluate a material/processchange by aggregating each stage of the process—from materials to fullsystems—into a single software workflow. This combination of advantagesprovided by these embodiments reduces the previous multi-year processfor evaluating material/process changes at the equipment manufacturerdown to days or weeks at most.

FIG. 1 illustrates a process flow of different operations that may beperformed to evaluate how a change to a material or process affects fullelectronic circuit systems, according to some embodiments. A firstentity involved in the process may include a semiconductor equipmentmanufacturer (“equipment manufacturer”) 102, which designs equipment formanufacturing electronic circuits on semiconductor wafers. One exampleof an equipment manufacturer 102 may include Applied Materials®.Generally, the equipment manufacturer 102 may make material/processchanges to alter how the equipment manufacturers a semiconductor device.These changes may include any change to the various physical aspects ofa semiconductor device, such as the size of a source/drain contact,types of isolation between transistors, gate oxide materials, workfunction metals, doping in source/drain regions, contact materials,liners in the contact materials, and/or any other parameters of asemiconductor device. Note that in the process flow of FIG. 1, theequipment manufacturer 102 could institute material/process changes 110,but would not typically understand the downstream effect of thosematerial/process changes 110 until the other entities andsoftware/hardware tools performed their corresponding operations asdescribed below. While the equipment manufacturer 102 could test thematerial/process change, it could only validate the consequences of thechange at a very small scale level for individual features or smalldevices. The equipment manufacturer 102 had no software/hardware toolsfor evaluating the consequences of the material/process change 110 atthe system-level, particularly for chip system running AWL software.

Next, the device fabricator 104 (i.e., the foundry) that purchasesequipment from the equipment manufacturer 102 would design simple devicestructures 112 to be used on the semiconductor manufacturing equipmentfor designing full semiconductor systems. These simple device structures112 may include circuit designs and layouts for transistors, diodes,capacitors, and other semiconductor devices. The device fabricator 104would then test the electrical characteristics of these individualdevices. For example, the equipment manufacturer 102 generally testsfeature parameters, such as the resistance of a via, the on-current of atransistor, and other relatively small-scale measurements for individualsemiconductor devices. Generally, these tests could include bothhardware tests and Technology Computer-Aided Design (TCAD) softwaretests that automate and model semiconductor fabrication andsemiconductor device operation. TCAD tools can model both process stepsand the behavior of electrical devices based on the fundamental physicsof the semiconductor layout. The device fabricator 102 may also createcompact models 116 (such as SPICE transistor models) of thesemiconductor devices that capture the behavior of the simple devicestructures for use in designing larger circuits that use thesemiconductor devices.

After the compact models 116 are generated, the compact models 116 canbe used to build a circuit for a standard cell. This step may beexecuted by the device fabricator 104 and/or the integrated circuitdesign entity 106. These two entities may work together or mayindividually handle different portions of the steps that are assigned tothe IC design entity 106 in FIG. 1. For example, when combining compactmodels of individual transistors together, additional aspects of thecircuit performance may be impacted based on the connections betweenthese transistors. Capacitances and dielectrics are formed betweencompact model transistors as they are combined together into a larger,multi-transistor circuit. At this level, the standard circuits 118 canbe designed in the EDA software and tested at the circuit level ratherthan at the transistor level. For example, standard circuits 118 can bebenchmarked against power consumption, frequency, and/or other simpleelectrical characteristics. As described above, material/process changes110 may affect the operation of the standard circuits 118, but theseeffects would not be discovered until the material/process changes 110had propagated down to the IC design entity 106 during simulation anduse of the EDA software, SPICE simulations, etc.

One of the most time-consuming aspects of the process was generatingfull PDK libraries and standard cells/memories. The PDK libraries mayinclude symbols, device parameters, parametric cells, design rules,layout versus schematic rules, electrical rules, layers, and so forth.When the material/process changes 110 were made by the equipmentmanufacturer 102, the PDK libraries 120 comprising standard circuitelements and cells are generally redesigned by the device fabricator 104and/or IC design entity 106. This is a time-consuming process becausethe PDK guarantees that designs created in the EDA software may befabricated by the device fabricator 104 at a predetermined yield.

Finally, system design entities 108 can design and run large circuitsystems using the PDK. The system design entities 108 may includefabless design shops that design circuit-based systems for fabricationat the fabrication entity. Additionally, an integrated devicemanufacturer (IDM) may include a semiconductor company that designs,manufactures, and sells integrated circuit products. Various designtools may be used by any of these system design entities 108 to designblock-level designs 122, including processors, memory blocks,multiply-accumulators (MACs), digital signal processors (DSPs), andother design blocks. These design blocks may be tested to determinewhether the performance, power, area, and/or cost requirements (PPAC)have been met. The system design entities 108 may also design full SoCdesigns 124 that integrate multiple design blocks into a single on-chipsystem. The full SoC designs 104 can also be tested to meet the PPACrequirements. In some cases, the full SoC designs 124 can also be testedas software algorithms 124 are run on the fabricated chips. The speedand efficiency of the software algorithms 126 may then be used to make afinal determination as to whether the material/process changes 110 wereeffective.

Because the process illustrated above in FIG. 1 may take multiple yearsto fully evaluate the material/process changes 110, the embodimentsdescribed herein describe a single-workflow system such that theequipment manufacturer 102 can evaluate the effect of thematerial/process changes 110 on the full SoC 124 and/or algorithms 126in a matter of days or weeks rather than a matter of years. Someexisting software tools may be used, but additional scripts have beendesigned to link these tools together, and a new process reduce thenumber of PDK components and standard cells that need to be designed toperform this evaluation.

FIG. 2 illustrates a unified process flow 200 of operations that may beperformed in a single workflow to evaluate how a change to a material orprocess affects full systems, according to some embodiments. Thisprocess flow 200 is similar to the process flow 100 illustrated above inFIG. 1. However, process flow 200 is executed by a single workflowexecuted by a single entity. Instead of passing off designs betweendifferent software tools that are operated at different locations,different computer systems, and by different entities; these embodimentsexecute each of the operations as part of a single workflow such thatthe entire process can be executed by a single entity and/or singlecomputer system. This reduces the time it takes to perform a fullmaterial-to-system evaluation of material/process changes 110 from yearsdown to weeks or days.

Process flow 200 also includes additional blocks 230, 232, 234 that addnew processes to the method that enable the various tools/processes tobe operated as part of a single workflow performed by the equipmentmanufacturer 102. After the material/process change 110 has beenimplemented, the new processes in block 230 may be executed. First, themethod may read and translate 202 the material/process changes 110 togenerate a database comprising a process library 204 and/or a materialslibrary 206. For example, some embodiments may store material/processinformation in table. The system may read and translate 202 the tableand extract process changes from the spreadsheet or table that had beenmade during a current design iteration. The read and translate process202 can characterize material by extracting all of its relevantproperties, such as those resulting from changes related to processesand those resulting from changes relating to materials. The processinformation may include information related to the specific technologynode, the specific device, transistor type, transistor parameters,material thicknesses, features lengths, channels, and/or the like. Thematerial information may include materials used in the device, linertypes/materials, material resistivities, material properties, and/orother properties. This information may be stored in the process library204 and/or the materials library 206. The process library 204 and/or thematerials library 206 may be built upfront at the beginning of theprocess, and they may be used throughout the remainder of the process.The process library 204 and/or the materials library 206 may be storedin a database that acts as a lookup function for use by later steps inthe process.

The information in the database can be referenced later by variousstages of the process to fill in the missing parameters that are used tobuild models. When building the simple device structures 112, the systemcan use a number of prebuilt, previously defined structures with missingparameters. The process can then query the database containing theprocess library 204, and the materials library 206 may function as alookup table to extract the relevant parameters that can then be pluggedinto the simple device structures. The simple device structures mayinclude lines, vias, simple transistors, and so forth, that are used tobuild the simple device structures described above. The simple devicestructures may also be referred to as “primitive” device structures, orprimitive circuit structures. Note that some embodiments use logicdevices, while other embodiments may use memory devices. For memoryembodiments, the simple device structures may include a memory filmstack.

After simple devices are constructed and the electoral characteristics114 may be extracted. As described below in relation to FIG. 4, TCADmodels and/or SPICE models may be generated from the characteristicsextracted from the database, and these models may be simulated togenerate electrical characteristics 114 for the simple devicestructures. At this stage, a first evaluation can be made as to how thematerial/process change 110 has affected the electoral characteristics114. If the effect has been negative, then different material/processchanges may be used instead, and the process may start over using thesedifferent material/process changes.

A second new processing block 232 may include new processes fortranslating the simple device structure into compact models that can beused to build the standard cell circuit 118. For example, if a 7 nmtransistor of a specific type, made from a specific materials isspecified, these parameters can be provided as inputs to the database tolook up relevant parameters to be inserted in the device model.Additionally, the electrical characteristics 114 may be fed into thisprocess for generating the compact models. The values provided may beapproximate compact model extractions. Therefore, the read and translateprocess 208 may extract the information from the materials library 206in the database and/or the electrical characteristics 114, and translatethat information to the values needed to build compact models for thecorresponding device types. This may include translating the propertiesfrom the database into approximate values required for the compactmodels. The translation process may be designed differently for eachspecific tool used to generate the compact models, and may comprisetranslating the data in the database and the electrical characteristics114 into values and formats that are readable by the particular tool. Atthis point, compact models can be automatically extracted 210 for use inbuilding the standard cell circuit 118. As described above, the standardcell circuit 118 may include a NAND gate, an inverter, and/or any othersimple circuit construct.

At this stage in the automated process, the system can build thestandard cell circuit 118 and evaluate the performance of the standardcell circuit 118. The entire process up to this point may be automatedsuch that the material/process change 110 propagates all the way throughto the standard cell circuit 118. The standard cell circuit 118 can thenbe processed to measure the PPAC characteristics of the cell(s) 118 anddetermine whether the process/material change 110 has positively ornegatively affected the operating characteristics of the standard cell118. For example, the oscillation frequency and power usage of a ringoscillator may be tested at this point to determine whether thematerial/process change 110 has positively or negatively affected theseoperating characteristics. If the effect is positive, the rest of theprocess may continue, while if the process is negative, the process maybe stopped and different material/process changes 110 may be used. Forembodiments using memory devices, a memory array may be constructed andmeasured instead of a ring oscillator or other logic devices.

After the standard cell is tested, a “lite” version of the PDK librarymay be generated. The previous accepted process for generating PDKlibraries was very manual and time-consuming. The embodiments describedherein using automated process wherein abstracted values for a giventechnology can be used to generate “lite” versions of only the elementsof the PDK library that are affected by the material/process change 110.For example, “abstracted” values can be derived by considering a processcondition or a sequence of process steps (e.g., lithography, etch,deposition, etc.) to be abstracted as a set of design rules (e.g.,tip-to-tip, enclosure rules, etc.). These abstracted and compactedvalues may be used in a way such that there is no loss of accuracy inthe simulation. These values can be abstracted, compacted, and/orpropagated to each subsequent stage. The values that are abstracted andcompacted very according to the different stages of execution. Forexample, material/process changes at the materials level may beabstracted to represent resistivity versus thickness. At the smallstructure or transistor level, these values may then be abstracted as UVand C/V characteristics. Next, at the standard cell level, theabstracted values may be used to generate cell characteristics, such asfunction, power, drive strength, fan-out, and so forth. Finally, whenthe PDK-lite library is generated, these abstracted values may generaterelevant design rules, such as spacing between lines, tip-to-tipspacing, and so forth. At each stage, these abstracted values may bestored in the material/process database as they are generated andinserted into models and simulations. The standard cell and PDKcharacteristics may be captured in the standard cell-lite and PDK-litedefinitions, and/or may be captured in the material/process database.

For example, the previous process for generating a PDK library involveda foundry moving from a different technology node, such as moving from 7nm to 5 nm. The foundry would begin with the previous version of the PDKat 7 nm with all of its associated overhead. It should also be notedthat the version of the PDK at 7 nm was likely layered on top of aprevious PDK library at 10 nm, such that each additional iteration ofthe PDK library adds additional layers and/or design rules to anexisting library. From the 7 nm PDK, the foundry would manually takeresults from physics experiments to shrink certain parameters in thecell libraries. The foundry would then communicate with the EDA vendorsto integrate the new PDK libraries with the new technology. Monthslater, the EDA software would be made available to the fabless designersand IDMs to actually implement and design software algorithms on thetechnology hardware.

These embodiments simplify this entire process for the purpose oftesting at the equipment manufacturer. Therefore, full PDK libraries arenot needed to perform this testing. Instead, a small set of PDK-litecells 212 may be designed for testing the effect of the material/processchange 110. Because only a relatively small number of changes have beenmade by the material/process change 110, a corresponding relativelysmall number of changes need to be made to an existing PDK library.Instead of building on top of a bloated PDK library, the software canmap the changes to the existing cell that would result from thematerial/process change 110. A simplified version of the PDK cell maythen be used with only a small number of changes related to the specificparameters that are affected by the material/process change 110. Someembodiments may use abstracted values for a given device without losingaccuracy in the end result simulations.

The same process may be used to generate standard cell libraries fromthe PDK-lite cells. Instead of the months-long manual process ofdesigning a library of standard cells, a “lite” version of the relevantstandard cells may be generated. Again, the abstracted values from theprocess library 204 and/or the materials library 206 may be used togenerate the lite version of the standard cells. For example, thematerials library may include values related to materialcharacteristics, such as dielectric constants and resistivities ofdifferent cereals. The process library may include process conditionssuch as deposition thickness and anneal temperature. These values fromthe material/process libraries may be abstracted at the standard celllevel as delay, power, rise and fall time, and/or other cellcharacteristics. These new standard cells can then be substituted intothe block level design 122 and the full chip SoC design 124, and thePPAC validation can be carried out to determine how the material/processchange 110 affects the system-level design. Additionally, someembodiments may also test various algorithms 126, such as AWLalgorithms, to determine the impact on the software operation of thematerial/process change 110. The lite version of the standard cellsand/or the lite version of the PDK library may be limited to featuresthat are required for this early-stage exploration. For example, thelite library may be generated to include only cells that are affected bythe material/process change and that are required in the system/SoCdesign. These cells may be generated as simple cells that include onlythe required characteristics rather than being layered on top of acomplete set of cells from a previous PDK library. It should beemphasized that the material/process innovations that are simulated upthrough the system-level and algorithm validation is made possiblewithout any significant loss of accuracy. Using abstracted values togenerate the compact models, lite standard cells, and lite PDK libraryhave been found to generate very accurate results at the system level.

It should be appreciated that the specific steps illustrated in FIG. 2provide particular methods of evaluating changes evaluatingmaterial/process changes in a semiconductor manufacturing processaccording to various embodiments. Other sequences of steps may also beperformed according to alternative embodiments. For example, alternativeembodiments may perform the steps outlined above in a different order.Moreover, the individual steps illustrated in FIG. 2 may includemultiple sub-steps that may be performed in various sequences asappropriate to the individual step. Furthermore, additional steps may beadded or removed depending on the particular applications. One ofordinary skill in the art would recognize many variations,modifications, and alternatives.

FIG. 3 illustrates a flowchart 300 of a method for performing a fullsystem evaluation for material/process changes with short-loop subevaluations at incremental stages, according to some embodiments. Thismethod includes a number of short-loop validations that test thematerial/process change at each stage of the manufacturing and circuitdesign pipeline in a single process. This allows the method to determineat each significant checkpoint whether the change has caused theprimitive/simple device, PDK library, standard cell, circuit, and/orsystem to exhibit unsatisfactory performance with regard to, forexample, PPAC requirements. In each short-loop validation, the systemcan determine whether the current material/process change is acceptable,or whether a new change should be iterated.

The method may first translate any material/process changes into valuesstored in the material/process database 302 as described above. Theremaining steps of the method may draw from the material/processdatabase 302 to retrieve these values as needed through the evaluationprocess. This database may include characteristics of the materials andprocesses used to construct small test structures. The method may thencalculate performance metrics for the small test structures 304. At thispoint, a first evaluation can be made to determine whether thematerial/process change stored in the material/process database 302 hascaused the small test structure to perform according to an acceptablethreshold. For example, the method may test the voltage, current,capacitance, etc., characteristics of the small test structure. The teststructures may include transistors, ring oscillators, NAND gates, and/orother simple circuits. The process may then iterate through additionalmaterial/process changes or additional test structure devices andperform a similar evaluation process on each. This short-loopoptimization allows a decision to be made early in the process as towhether the proposed material/process changes will be acceptable. Italso allows new materials to be tested as alternatives in rapidsuccession.

As described above, for material/process changes that pass theevaluation for the small test structures, a lite standard cell libraryor lite embedded memory structure may be generated automatically fromthe material/process database 302. To continue the full system testingprocess, the method may include generating any of the necessarycomponents for synthesis, floor planning, place and route, clock treesynthesis, circuit timing, etc. (310). These may be used to generatecustom circuits, such as analog, digital, and mixed-signal circuits(312). For memory elements, memory arrays can be generated along withmacro-cell designs (314). Finally, any or all of these components may beassembled in a full chip integration design, and an evaluation can bemade as to whether the design passes the PPAC requirements (316). Atthis stage, another short-loop optimization decision can be made as towhether the effect of the material/process change on a larger systemfalls within an acceptable range. If not, then a decision 320 can bemade to iterate to a different material/process change. Multiple designsmay be tested 318 until each design has been validated using the newmaterial/process change. A database 324 can store results and/or designsfor the system that have passed the PPAC requirements. Multiplematerial/process changes may be evaluated, and a set of candidate oracceptable material/process changes may be saved to continue theevaluation going forward.

Finally, a third optimization loop may be executed by implementingsoftware algorithms on the digital systems. Various software algorithmscan be retrieved from a database 326 and mapped onto the design of thetested systems 328. System-level traffic can be generated to test thealgorithm 330, and the system can calculate the accuracy and performanceof the circuit (332). Again, the performance of the algorithm can bevalidated in comparison to multiple metrics, including PPACrequirements. This final optimization loop can iterate through multiplealgorithms (336), multiple system designs (338), and/or multiplematerial/process changes (340) if the performance of the algorithm isnot satisfactory. This step may also compare results from multipledesigns to determine an optimal material/process change from a set ofproposed material/process changes.

It should be appreciated that the specific steps illustrated in FIG. 3provide particular methods of evaluating changes evaluatingmaterial/process changes in a semiconductor manufacturing processaccording to various embodiments. Other sequences of steps may also beperformed according to alternative embodiments. For example, alternativeembodiments may perform the steps outlined above in a different order.Moreover, the individual steps illustrated in FIG. 3 may includemultiple sub-steps that may be performed in various sequences asappropriate to the individual step. Furthermore, additional steps may beadded or removed depending on the particular applications. One ofordinary skill in the art would recognize many variations,modifications, and alternatives.

FIG. 4 illustrates an example of a short-loop optimization using theintegrated testing workflow described above in FIG. 3, according to someembodiments. In this example, a short-loop optimization cycle may becompleted up to the small-circuit test on a circuit such as atransistor. First, a TCAD model 402 may be generated that includes allof the resistances and capacitances that result from connectingprimitive devices/structures together. For example, sources, drains,gate electrodes, oxides, and so forth, may generate parasiticcapacitances as they are connected to form transistor circuits. The TCADmodel 402 captures these capacitances in a silicon layout. This modelmay be built in TCAD using rules that are applicable to each of the N,N+1, N+2, etc., technology iterations (e.g., 7 nm, 5 nm, 3 nm, etc.).

The TCAD model 402 may then be used to generate a SPICE model. Thecompact model described above may be used as part of the SPICEsimulation to simulate the performance of the circuit (e.g., thetransistor) and generate current, voltage, timing, and other electricalcharacteristics for the circuit. At this point, the simulations in bothTCAD and SPICE can serve as a first checkpoint to determine whether thematerial/process change has affected the performance of the circuit inan acceptable manner. In some embodiments, the simulation data from TCADmay be used as the standard, and the SPICE simulation data may becompared to the TCAD simulation data. If the SPICE simulation data isclose to the TCAD simulation data within a threshold amount, then thespice simulation can be used afterward to test the circuit. For example,test data 406 may be generated from either of the models 402, 404 forevaluation purposes.

Note that the TCAD model 402 illustrates the various levels of materialdeposition that may be used to form the transistor. This may include themetal 1 layer (M1), the via 1 layer (V1), the contact layer (CT), and soforth. The TCAD model 402 captures all of the resistances andcapacitances that may be generated by the layout of the circuit. Thisallows the equipment manufacturer to make changes to the layout of thecircuit. For example, in FIG. 4 at least five different sets of testdata have been generated as illustrated in the optimization graph 408.The first experiment used the conventional design of the transistor,while each of the subsequent experiments (e.g., Exp 1, Exp 2, etc.)implemented one or more material/process changes used to generate theTCAD model 402 and/or the spice model 404. The final experiment (Exp 3+)shows the most improvement in the delay contributed by the CT layer ofthe circuit. By performing multiple test using different types ofmaterial/process changes, this short-loop optimization cycle can revealthe best changes for the performance of the small circuit. This can alsoreveal at an early stage material/process changes that are likely tohave the greatest effect on system-level performance later on in theprocess.

FIG. 5 illustrates an example of a second short-loop optimization totranslate the technology features into design rules, and then into alite PDK library, according to some embodiments. Different technologiesaffect the design rules that are implemented in different ways. In thisexample, two different design rules may be proposed by the system forevaluation. The “Tech A” design rules 502 a may be compared to the “TechB” design rules 502 b. By way of comparison, the “Tech B” design rules502 b offer tighter back end of line (BEOL) design rules due to improvedmaterial design, process optimization, and integration proposed in theinitial steps of this process described above.

The effect on design rules and interconnect models may be captured inthe corresponding PDK 504 for each of the design rules 502 a, 502 b. Foreach of these design rules 502 a, 502 b, a PDK-lite may be generatedthat includes compact models, the design rules, and interconnect modelsfor generating each of the circuit elements in the EDA software. Next,the system may automatically generate a set of standard-lite cells 508.Different standard cells may be generated for each of the differenttechnologies that are being tested. As described above, changes to thedesign rules can be used to make small changes to the existing standardcells to generate the standard-lite cells 508.

Next, circuits may be generated that use the standard cells 508 and aplace and route 506 for each of the different technologies can begenerated. In this example, the interconnects of Tech B are much denser,and the heat maps illustrated for the place and route 506 in FIG. 5illustrate the relative density between Tech A and Tech B. This allowsthe circuit of Tech B to be implemented in a much smaller footprint inthe semiconductor circuit. Next, the PPA metrics 510 can be compared todetermine which technology is more effective by comparison. Asillustrated in FIG. 5, the PPA metrics 510 show that Tech B is able tooffer a 20% reduction in circuit area without significantly negativelyaffecting the performance or power metrics of the circuit. Error results512 can also be compared between the two technologies. In this example,Tech B results in fewer design rule check (DRC) errors than Tech A.Again, this short-loop optimization is able to quickly assess the effectof a material/process change in a technology as it is propagated forwardthrough the design process into actual placed, routed, and implementedsystems.

FIG. 6 illustrates an exemplary computer system 600, in which variousembodiments may be implemented. The system 600 may be used to implementany of the computer systems described above. As shown in the figure,computer system 600 includes a processing unit 604 that communicateswith a number of peripheral subsystems via a bus subsystem 602. Theseperipheral subsystems may include a processing acceleration unit 606, anI/O subsystem 608, a storage subsystem 618 and a communicationssubsystem 624. Storage subsystem 618 includes tangible computer-readablestorage media 622 and a system memory 610.

Bus subsystem 602 provides a mechanism for letting the variouscomponents and subsystems of computer system 600 communicate with eachother as intended. Although bus subsystem 602 is shown schematically asa single bus, alternative embodiments of the bus subsystem may utilizemultiple buses. Bus subsystem 602 may be any of several types of busstructures including a memory bus or memory controller, a peripheralbus, and a local bus using any of a variety of bus architectures. Forexample, such architectures may include an Industry StandardArchitecture (ISA) bus, Micro Channel Architecture (MCA) bus, EnhancedISA (EISA) bus, Video Electronics Standards Association (VESA) localbus, and Peripheral Component Interconnect (PCI) bus, which can beimplemented as a Mezzanine bus manufactured to the IEEE P1386.1standard.

Processing unit 604, which can be implemented as one or more integratedcircuits (e.g., a conventional microprocessor or microcontroller),controls the operation of computer system 600. One or more processorsmay be included in processing unit 604. These processors may includesingle core or multicore processors. In certain embodiments, processingunit 604 may be implemented as one or more independent processing units632 and/or 634 with single or multicore processors included in eachprocessing unit. In other embodiments, processing unit 604 may also beimplemented as a quad-core processing unit formed by integrating twodual-core processors into a single chip.

In various embodiments, processing unit 604 can execute a variety ofprograms in response to program code and can maintain multipleconcurrently executing programs or processes. At any given time, some orall of the program code to be executed can be resident in processor(s)604 and/or in storage subsystem 618. Through suitable programming,processor(s) 604 can provide various functionalities described above.Computer system 600 may additionally include a processing accelerationunit 606, which can include a digital signal processor (DSP), aspecial-purpose processor, and/or the like.

I/O subsystem 608 may include user interface input devices and userinterface output devices. User interface input devices may include akeyboard, pointing devices such as a mouse or trackball, a touchpad ortouch screen incorporated into a display, a scroll wheel, a click wheel,a dial, a button, a switch, a keypad, audio input devices with voicecommand recognition systems, microphones, and other types of inputdevices. User interface input devices may include, for example, motionsensing and/or gesture recognition devices such as the Microsoft Kinect®motion sensor that enables users to control and interact with an inputdevice, such as the Microsoft Xbox® 360 game controller, through anatural user interface using gestures and spoken commands. Userinterface input devices may also include eye gesture recognition devicessuch as the Google Glass® blink detector that detects eye activity(e.g., ‘blinking’ while taking pictures and/or making a menu selection)from users and transforms the eye gestures as input into an input device(e.g., Google Glass®). Additionally, user interface input devices mayinclude voice recognition sensing devices that enable users to interactwith voice recognition systems (e.g., Siri® navigator), through voicecommands.

User interface input devices may also include, without limitation, threedimensional (3D) mice, joysticks or pointing sticks, gamepads andgraphic tablets, and audio/visual devices such as speakers, digitalcameras, digital camcorders, portable media players, webcams, imagescanners, fingerprint scanners, barcode reader 3D scanners, 3D printers,laser rangefinders, and eye gaze tracking devices. Additionally, userinterface input devices may include, for example, medical imaging inputdevices such as computed tomography, magnetic resonance imaging,position emission tomography, medical ultrasonography devices. Userinterface input devices may also include, for example, audio inputdevices such as MIDI keyboards, digital musical instruments and thelike.

User interface output devices may include a display subsystem, indicatorlights, or non-visual displays such as audio output devices, etc. Thedisplay subsystem may be a cathode ray tube (CRT), a flat-panel device,such as that using a liquid crystal display (LCD) or plasma display, aprojection device, a touch screen, and the like. In general, use of theterm “output device” is intended to include all possible types ofdevices and mechanisms for outputting information from computer system600 to a user or other computer. For example, user interface outputdevices may include, without limitation, a variety of display devicesthat visually convey text, graphics and audio/video information such asmonitors, printers, speakers, headphones, automotive navigation systems,plotters, voice output devices, and modems.

Computer system 600 may comprise a storage subsystem 618 that comprisessoftware elements, shown as being currently located within a systemmemory 610. System memory 610 may store program instructions that areloadable and executable on processing unit 604, as well as datagenerated during the execution of these programs.

Depending on the configuration and type of computer system 600, systemmemory 610 may be volatile (such as random access memory (RAM)) and/ornon-volatile (such as read-only memory (ROM), flash memory, etc.) TheRAM typically contains data and/or program modules that are immediatelyaccessible to and/or presently being operated and executed by processingunit 604. In some implementations, system memory 610 may includemultiple different types of memory, such as static random access memory(SRAM) or dynamic random access memory (DRAM). In some implementations,a basic input/output system (BIOS), containing the basic routines thathelp to transfer information between elements within computer system600, such as during start-up, may typically be stored in the ROM. By wayof example, and not limitation, system memory 610 also illustratesapplication programs 612, which may include client applications, Webbrowsers, mid-tier applications, relational database management systems(RDBMS), etc., program data 614, and an operating system 616. By way ofexample, operating system 616 may include various versions of MicrosoftWindows®, Apple Macintosh®, and/or Linux operating systems, a variety ofcommercially-available UNIX® or UNIX-like operating systems (includingwithout limitation the variety of GNU/Linux operating systems, theGoogle Chrome® OS, and the like) and/or mobile operating systems such asiOS, Windows® Phone, Android® OS, BlackBerry® 10 OS, and Palm® OSoperating systems.

Storage subsystem 618 may also provide a tangible computer-readablestorage medium for storing the basic programming and data constructsthat provide the functionality of some embodiments. Software (programs,code modules, instructions) that when executed by a processor providethe functionality described above may be stored in storage subsystem618. These software modules or instructions may be executed byprocessing unit 604. Storage subsystem 618 may also provide a repositoryfor storing data used in accordance with various embodiments.

Storage subsystem 600 may also include a computer-readable storage mediareader 620 that can further be connected to computer-readable storagemedia 622. Together and, optionally, in combination with system memory610, computer-readable storage media 622 may comprehensively representremote, local, fixed, and/or removable storage devices plus storagemedia for temporarily and/or more permanently containing, storing,transmitting, and retrieving computer-readable information.

Computer-readable storage media 622 containing code, or portions ofcode, can also include any appropriate media known or used in the art,including storage media and communication media, such as but not limitedto, volatile and non-volatile, removable and non-removable mediaimplemented in any method or technology for storage and/or transmissionof information. This can include tangible computer-readable storagemedia such as RAM, ROM, electronically erasable programmable ROM(EEPROM), flash memory or other memory technology, CD-ROM, digitalversatile disk (DVD), or other optical storage, magnetic cassettes,magnetic tape, magnetic disk storage or other magnetic storage devices,or other tangible computer readable media. This can also includenontangible computer-readable media, such as data signals, datatransmissions, or any other medium which can be used to transmit thedesired information and which can be accessed by computing system 600.

By way of example, computer-readable storage media 622 may include ahard disk drive that reads from or writes to non-removable, nonvolatilemagnetic media, a magnetic disk drive that reads from or writes to aremovable, nonvolatile magnetic disk, and an optical disk drive thatreads from or writes to a removable, nonvolatile optical disk such as aCD ROM, DVD, and Blu-Ray® disk, or other optical media.Computer-readable storage media 622 may include, but is not limited to,Zip® drives, flash memory cards, universal serial bus (USB) flashdrives, secure digital (SD) cards, DVD disks, digital video tape, andthe like. Computer-readable storage media 622 may also include,solid-state drives (SSD) based on non-volatile memory such asflash-memory based SSDs, enterprise flash drives, solid state ROM, andthe like, SSDs based on volatile memory such as solid state RAM, dynamicRAM, static RAM, DRAM-based SSDs, magnetoresistive RAM (MRAM) SSDs, andhybrid SSDs that use a combination of DRAM and flash memory based SSDs.The disk drives and their associated computer-readable media may providenon-volatile storage of computer-readable instructions, data structures,program modules, and other data for computer system 600.

Communications subsystem 624 provides an interface to other computersystems and networks. Communications subsystem 624 serves as aninterface for receiving data from and transmitting data to other systemsfrom computer system 600. For example, communications subsystem 624 mayenable computer system 600 to connect to one or more devices via theInternet. In some embodiments communications subsystem 624 can includeradio frequency (RF) transceiver components for accessing wireless voiceand/or data networks (e.g., using cellular telephone technology,advanced data network technology, such as 3G, 4G or EDGE (enhanced datarates for global evolution), WiFi (IEEE 802.11 family standards, orother mobile communication technologies, or any combination thereof),global positioning system (GPS) receiver components, and/or othercomponents. In some embodiments communications subsystem 624 can providewired network connectivity (e.g., Ethernet) in addition to or instead ofa wireless interface.

In some embodiments, communications subsystem 624 may also receive inputcommunication in the form of structured and/or unstructured data feeds626, event streams 628, event updates 630, and the like on behalf of oneor more users who may use computer system 600.

By way of example, communications subsystem 624 may be configured toreceive data feeds 626 in real-time from users of social networks and/orother communication services such as Twitter® feeds, Facebook® updates,web feeds such as Rich Site Summary (RSS) feeds, and/or real-timeupdates from one or more third party information sources.

Additionally, communications subsystem 624 may also be configured toreceive data in the form of continuous data streams, which may includeevent streams 628 of real-time events and/or event updates 630, that maybe continuous or unbounded in nature with no explicit end. Examples ofapplications that generate continuous data may include, for example,sensor data applications, financial tickers, network performancemeasuring tools (e.g. network monitoring and traffic managementapplications), clickstream analysis tools, automobile trafficmonitoring, and the like.

Communications subsystem 624 may also be configured to output thestructured and/or unstructured data feeds 626, event streams 628, eventupdates 630, and the like to one or more databases that may be incommunication with one or more streaming data source computers coupledto computer system 600.

Computer system 600 can be one of various types, including a handheldportable device (e.g., an iPhone® cellular phone, an iPad® computingtablet, a PDA), a wearable device (e.g., a Google Glass® head mounteddisplay), a PC, a workstation, a mainframe, a kiosk, a server rack, orany other data processing system.

Due to the ever-changing nature of computers and networks, thedescription of computer system 600 depicted in the figure is intendedonly as a specific example. Many other configurations having more orfewer components than the system depicted in the figure are possible.For example, customized hardware might also be used and/or particularelements might be implemented in hardware, firmware, software (includingapplets), or a combination. Further, connection to other computingdevices, such as network input/output devices, may be employed. Based onthe disclosure and teachings provided herein, a person of ordinary skillin the art will appreciate other ways and/or methods to implement thevarious embodiments.

In the foregoing description, for the purposes of explanation, numerousspecific details were set forth in order to provide a thoroughunderstanding of various embodiments. It will be apparent, however, toone skilled in the art that embodiments may be practiced without some ofthese specific details. In other instances, well-known structures anddevices are shown in block diagram form.

The foregoing description provides exemplary embodiments only, and isnot intended to limit the scope, applicability, or configuration of thedisclosure. Rather, the foregoing description of the exemplaryembodiments will provide those skilled in the art with an enablingdescription for implementing an exemplary embodiment. It should beunderstood that various changes may be made in the function andarrangement of elements without departing from the spirit and scope ofvarious embodiments as set forth in the appended claims.

Specific details are given in the foregoing description to provide athorough understanding of the embodiments. However, it will beunderstood by one of ordinary skill in the art that the embodiments maybe practiced without these specific details. For example, circuits,systems, networks, processes, and other components may have been shownas components in block diagram form in order not to obscure theembodiments in unnecessary detail. In other instances, well-knowncircuits, processes, algorithms, structures, and techniques may havebeen shown without unnecessary detail in order to avoid obscuring theembodiments.

Also, it is noted that individual embodiments may have been described asa process which is depicted as a flowchart, a flow diagram, a data flowdiagram, a structure diagram, or a block diagram. Although a flowchartmay have described the operations as a sequential process, many of theoperations can be performed in parallel or concurrently. In addition,the order of the operations may be re-arranged. A process is terminatedwhen its operations are completed, but could have additional steps notincluded in a figure. A process may correspond to a method, a function,a procedure, a subroutine, a subprogram, etc. When a process correspondsto a function, its termination can correspond to a return of thefunction to the calling function or the main function.

The term “computer-readable medium” includes, but is not limited toportable or fixed storage devices, optical storage devices, wirelesschannels and various other mediums capable of storing, containing, orcarrying instruction(s) and/or data. A code segment ormachine-executable instructions may represent a procedure, a function, asubprogram, a program, a routine, a subroutine, a module, a softwarepackage, a class, or any combination of instructions, data structures,or program statements. A code segment may be coupled to another codesegment or a hardware circuit by passing and/or receiving information,data, arguments, parameters, or memory contents. Information, arguments,parameters, data, etc., may be passed, forwarded, or transmitted via anysuitable means including memory sharing, message passing, token passing,network transmission, etc.

Furthermore, embodiments may be implemented by hardware, software,firmware, middleware, microcode, hardware description languages, or anycombination thereof. When implemented in software, firmware, middlewareor microcode, the program code or code segments to perform the necessarytasks may be stored in a machine readable medium. A processor(s) mayperform the necessary tasks.

In the foregoing specification, aspects of various embodiments aredescribed with reference to specific embodiments thereof, but thoseskilled in the art will recognize that not all embodiments are limitedthereto. Various features and aspects of the above-described embodimentsmay be used individually or jointly. Further, embodiments can beutilized in any number of environments and applications beyond thosedescribed herein without departing from the broader spirit and scope ofthe specification. The specification and drawings are, accordingly, tobe regarded as illustrative rather than restrictive.

Additionally, for the purposes of illustration, methods were describedin a particular order. It should be appreciated that in alternateembodiments, the methods may be performed in a different order than thatdescribed. It should also be appreciated that the methods describedabove may be performed by hardware components or may be embodied insequences of machine-executable instructions, which may be used to causea machine, such as a general-purpose or special-purpose processor orlogic circuits programmed with the instructions to perform the methods.These machine-executable instructions may be stored on one or moremachine readable mediums, such as CD-ROMs or other type of opticaldisks, floppy diskettes, ROMs, RAMs, EPROMs, EEPROMs, magnetic oroptical cards, flash memory, or other types of machine-readable mediumssuitable for storing electronic instructions. Alternatively, the methodsmay be performed by a combination of hardware and software.

What is claimed is:
 1. A method for evaluating effects of semiconductormaterial or process changes on software algorithms, the methodcomprising: receiving, by one or more computing systems, a material orprocess change for a semiconductor manufacturing process; translating,by the one or more computing systems, the material or process changeinto a database of characteristics; generating, by the one or morecomputing systems, primitive circuit structures using the database ofcharacteristics; performing, by the one or more computing systems, anelectrical characterization of the primitive circuit structures;providing, by the one or more computing systems, an output of theelectrical characterization to a script to generate compact models;generating, by the one or more computing systems, a lite version ofstandard cells; generating, by the one or more computing systems, adigital system based on the lite version of the standard cells; andevaluating, by the one or more computing systems, a performance of asoftware algorithm on the digital system to determine an effect of thematerial or process change for the semiconductor manufacturing process.2. The method of claim 1, wherein the primitive circuit structurescomprise a transistor.
 3. The method of claim 2, wherein performing theelectrical characterization of the primitive circuit structurescomprises generating current and voltage characteristics for thetransistor.
 4. The method of claim 1, further comprising performing, bythe one or more computing systems, a Technology Computer-Aided Design(TCAD) simulation of the primitive circuit structures.
 5. The method ofclaim 4, further comprising: generating, by the one or more computingsystems, circuit models of the primitive circuit structures using thedatabase of characteristics and the TCAD simulation; and performing, bythe one or more computing systems, a circuit simulation of the circuitmodels.
 6. The method of claim 5, further comprising: determining, bythe one or more computing systems, that the material or process changefor the semiconductor manufacturing process is acceptable based onresults of the circuit simulation of the circuit models.
 7. The methodof claim 1, further comprising: receiving, by the one or more computingsystems, a plurality of material or process changes for thesemiconductor manufacturing process; translating, by the one or morecomputing systems, the plurality of material or process changes into thedatabase of characteristics; generating, by the one or more computingsystems, additional primitive circuit structures using the database ofcharacteristics for each of the plurality of material or processchanges; simulating, by the one or more computing systems, theadditional primitive circuit structures; and identifying, by the one ormore computing systems, acceptable material or process changes in theplurality of material or process changes based on results of simulatingthe primitive circuit structures.
 8. A system comprising: one or moreprocessors; one or more memory devices comprising instructions that,when executed by the one or more processors, cause the one or moreprocessors to perform operations comprising: receiving a material orprocess change for a semiconductor manufacturing process; translatingthe material or process change into a database of characteristics;generating primitive circuit structures using the database ofcharacteristics; performing an electrical characterization of theprimitive circuit structures; providing an output of the electricalcharacterization to a script to generate compact models; generating alite version of standard cells; generating a digital system based on thelite version of the standard cells; and evaluating a performance of asoftware algorithm on the digital system to determine an effect of thematerial or process change for the semiconductor manufacturing process.9. The system of claim 8, wherein the primitive circuit structurescomprise a memory film stack.
 10. The system of claim 9, wherein thelite version of the standard cells comprising a memory array.
 11. Thesystem of claim 8, wherein the compact models comprise a ringoscillator.
 12. The system of claim 11, wherein the operations furthercomprise: testing a performance of the ring oscillator to determinePower-Performance-Area-Cost (PPAC) characteristics; and determining thatthe performance of the ring oscillator is acceptable before generatingthe lite version of the standard cells.
 13. The system of claim 8,wherein the lite version of the standard cells omits features that arenot required for the digital system.
 14. The system of claim 8, whereinthe software algorithm comprises an Artificial Intelligence (AI) and/orMachine Learning (ML) algorithm.
 15. A non-transitory computer-readablemedium comprising instructions that, when executed by one or moreprocessors, cause the one or more processors to perform operationscomprising: receiving a material or process change for a semiconductormanufacturing process; translating the material or process change into adatabase of characteristics; generating primitive circuit structuresusing the database of characteristics; performing an electricalcharacterization of the primitive circuit structures; providing anoutput of the electrical characterization to a script to generatecompact models; generating a lite version of standard cells; generatinga digital system based on the lite version of the standard cells; andevaluating a performance of a software algorithm on the digital systemto determine an effect of the material or process change for thesemiconductor manufacturing process.
 16. The non-transitorycomputer-readable medium of claim 15, wherein the operations furthercomprise: generating a lite version of a Process Design Kit (PDK) usingthe lite version of the standard cells.
 17. The non-transitorycomputer-readable medium of claim 16, wherein cells in the PDK useabstracted values extracted from the database of characteristics. 18.The non-transitory computer-readable medium of claim 16, wherein thelite version of the PDK may include only cells that are affected by thematerial or process change for the semiconductor manufacturing process.19. The non-transitory computer-readable medium of claim 15, wherein thedigital system comprises a processor.
 20. The non-transitorycomputer-readable medium of claim 15, wherein the operations furthercomprise conducting at least two short-loop optimization tests beforegenerating the digital system to test Power-Performance-Area-Cost (PPAC)characteristics of the primitive circuit structures and the lite versionof the standard cells.